10.22376/ijpbs.2019.10.1.p1-12 Volume 8 Issue 1 2017 (January - March) In last decade, arrival of Micro-electromechanical systems (MEMS) have been immense and ever growing. In this paper, we have proposed a new T-shape and disc shape MEMS based triple coupled Cantilever sensors. We have designed and simulated a T-Shape and disc shape MEMS based triple coupled cantilever sensor made up of P-Silicon (Polycrystalline, Lightly doped) .Both coupled sensors have same effective area. The simulation results like displacement, Eigen-frequency, surface stress, temperature, measurements of the both triple coupled cantilever sensors are compared .This paper gives relative study of two different shape coupled micro-cantilevers. N.SIDDAIAH, G.R.K PRASAD, D.V.RAMA KOTI REDDY AND DR.B.MAHENDRAN MEMS, T-shape, Disc shape, Eigen frequency, Sensor, Triple coupled cantilever(TCC) 238-246